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  1. CMI - Center of MicroNanoTechnology

    The CMI is a complex of clean rooms and processing equipment for the training and scientific experimentation devoted to the users of microtechnologies.
    SEM3
    diffusion2
    cleanroom1
    MEMS1
    ICP1
    MEB1
    microelectronics1
    PVD1
    oxidation1
    CVD1
    wafers1
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    NEMS1
    microfabrication1
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    LPCVD1
    MOEMS1
    wet etch1
    dry etch1

    cmi.epfl.ch - 2009-04-10

nano2 semiconductor2 silicon2 wafer1 jose2 icp1 electronics4 etch1 chocolate3 electronic3 micro2 valley3 glass3 equipment4 mems1 dry etching1 plasma2 nanotechnology2 etching2 california5 engrave1

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